Inventor
ABEN PAUL CORNELIS HUBERTUS
NL6 patents
Patents
6 patentsUS10859930B2Dec 8, 2020
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing
ASML NETHERLANDS BV1 citations71
US10191390B2Jan 29, 2019
Method for transferring a mark pattern to a substrate, a calibration method, and a lithographic apparatus
ASML NETHERLANDS BV2 citations68
USRE49460EMar 14, 2023
Inspection method and apparatus and lithographic processing cell
ASML NETHERLANDS BV0 citations60
USRE49199ESep 6, 2022
Inspection method and apparatus and lithographic processing cell
ASML NETHERLANDS BV0 citations60
US11300891B2Apr 12, 2022
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing
ASML NETHERLANDS BV0 citations60
US8887107B2Nov 11, 2014
Inspection method and apparatus and lithographic processing cell
ASML NETHERLANDS BV2 citations60