Inventor
RAMALINGAM CHIDAMBARA A
US7 patents
⚠️ This page may combine multiple inventors who share the name “RAMALINGAM CHIDAMBARA A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7980000B2Jul 19, 2011
Vapor dryer having hydrophilic end effector
APPLIED MATERIALS INC13 citations79
US12131934B2Oct 29, 2024
Semiconductor substrate support leveling apparatus
APPLIED MATERIALS INC1 citations58
US12581880B2Mar 17, 2026
Faraday faceplate
APPLIED MATERIALS INC0 citations57
US11499229B2Nov 15, 2022
Substrate supports including metal-ceramic interfaces
APPLIED MATERIALS INC1 citations55
US11848218B2Dec 19, 2023
Semiconductor chamber component cleaning systems
APPLIED MATERIALS INC0 citations53
US11851758B2Dec 26, 2023
Fabrication of a high temperature showerhead
APPLIED MATERIALS INC0 citations50