Inventor
KOMAKI TAKAMITSU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KOMAKI TAKAMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
12 patentsUS11422461B2Aug 23, 2022
Imprint apparatus and method of manufacturing article
CANON KK2 citations71
US11372342B2Jun 28, 2022
Position measurement apparatus, overlay inspection apparatus, position measurement method, imprint apparatus, and article manufacturing method
CANON KK3 citations69
US11880132B2Jan 23, 2024
Imprint apparatus and method of manufacturing article
CANON KK0 citations61
US11537056B2Dec 27, 2022
Measurement apparatus, lithography apparatus, and method of manufacturing article
CANON KK1 citations61
US10732523B2Aug 4, 2020
Detection device, imprint apparatus, method of manufacturing article, illumination optical system, and detection method
CANON KK1 citations60
US10732522B2Aug 4, 2020
Imprint apparatus and article manufacturing method
CANON KK1 citations60
US11181363B2Nov 23, 2021
Measurement device, imprint apparatus, method for manufacturing product, light amount determination method, and light amount adjustment method
CANON KK1 citations59
US10545416B2Jan 28, 2020
Detection apparatus, lithography apparatus, and method of manufacturing article
CANON KK0 citations51
US12098913B2Sep 24, 2024
Detector that detects relative positions of marks while blocking non-interference light
CANON KK0 citations50
US11188001B2Nov 30, 2021
Alignment apparatus, alignment method, lithography apparatus, and method of manufacturing article
CANON KK0 citations50
US11673313B2Jun 13, 2023
Imprint apparatus and article manufacturing method
CANON KK0 citations48
US10777440B2Sep 15, 2020
Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method
CANON KK0 citations40