P

Inventor

SUGAI HIDEO

JP31 patents
⚠️ This page may combine multiple inventors who share the name “SUGAI HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

13 patents
US9837249B2Dec 5, 2017

Radial waveguide systems and methods for post-match control of microwaves

APPLIED MATERIALS INC111 citations99
US9564296B2Feb 7, 2017

Radial waveguide systems and methods for post-match control of microwaves

APPLIED MATERIALS INC129 citations99
US9299537B2Mar 29, 2016

Radial waveguide systems and methods for post-match control of microwaves

APPLIED MATERIALS INC160 citations99
US10153133B2Dec 11, 2018

Plasma reactor having digital control over rotation frequency of a microwave field with direct up-conversion

APPLIED MATERIALS INC6 citations84
US11972930B2Apr 30, 2024

Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide

APPLIED MATERIALS INC1 citations73
US11195699B2Dec 7, 2021

Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide

APPLIED MATERIALS INC2 citations73
US10340124B2Jul 2, 2019

Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide

APPLIED MATERIALS INC3 citations73
US12288675B2Apr 29, 2025

Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide

APPLIED MATERIALS INC0 citations63
US11348783B2May 31, 2022

Methods and apparatus for dynamical control of radial uniformity with two-story microwave cavities

APPLIED MATERIALS INC1 citations62
US10903052B2Jan 26, 2021

Systems and methods for radial and azimuthal control of plasma uniformity

APPLIED MATERIALS INC1 citations62
US10431429B2Oct 1, 2019

Systems and methods for radial and azimuthal control of plasma uniformity

APPLIED MATERIALS INC1 citations62
US11355317B2Jun 7, 2022

Methods and apparatus for dynamical control of radial uniformity in microwave chambers

APPLIED MATERIALS INC0 citations52
US10453655B2Oct 22, 2019

Plasma reactor having digital control over rotation frequency of a microwave field with direct up-conversion

APPLIED MATERIALS INC0 citations52

KANSAI PAINT CO LTD

7 patents

NISSIN INC

3 patents

TOSHIBA KK

1 patent

MIZUSAWA INDUSTRIAL CHEM

1 patent

SUGAI HIDEO

1 patent

WADA SEIJI

1 patent

NAGANO TOSHIAKI

1 patent

UNIV NAGOYA NAT UNIV CORP

1 patent

ISHIKURA MINORU

1 patent

CHIGA KOKI

1 patent