Inventor
IKEDA TOWL
JP14 patents
⚠️ This page may combine multiple inventors who share the name “IKEDA TOWL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
13 patentsUS5819683AOct 13, 1998
Trap apparatus
TOKYO ELECTRON LTD111 citations98
US5314541AMay 24, 1994
Reduced pressure processing system and reduced pressure processing method
TOKYO ELECTRON LTD127 citations98
US4998062AMar 5, 1991
Probe device having micro-strip line structure
TOKYO ELECTRON LTD123 citations97
US5240556AAug 31, 1993
Surface-heating apparatus and surface-treating method
TOKYO ELECTRON LTD75 citations96
US5455082AOct 3, 1995
Reduced pressure processing system and reduced pressure processing method
TOKYO ELECTRON LTD69 citations95
US5730804AMar 24, 1998
Process gas supply apparatus
TOKYO ELECTRON LTD65 citations93
US5676757AOct 14, 1997
Decompression container
TOKYO ELECTRON LTD23 citations92
US5520142AMay 28, 1996
Decompression container
TOKYO ELECTRON LTD29 citations92
US5433780AJul 18, 1995
Vacuum processing apparatus and exhaust system that prevents particle contamination
TOKYO ELECTRON LTD36 citations92
US5426865AJun 27, 1995
Vacuum creating method and apparatus
TOKYO ELECTRON LTD38 citations92
US5061894AOct 29, 1991
Probe device
TOKYO ELECTRON LTD30 citations92
US5198755AMar 30, 1993
Probe apparatus
TOKYO ELECTRON LTD17 citations74
US5091694AFeb 25, 1992
Quartz probe apparatus
TOKYO ELECTRON LTD15 citations74