Inventor

HAMAMOTO KAZUTOSHI

JP2 patents

Patents

2 patents

US5261962ANov 16, 1993

Plasma-chemical vapor-phase epitaxy system comprising a planar antenna

MITSUBISHI HEAVY IND LTD65 citations94

US5405447AApr 11, 1995

Plasma CVD apparatus

MITSUBISHI HEAVY IND LTD5 citations61