Inventor
ONODA KUNIHIRO
JP5 patents
Patents
5 patentsUS6251754B1Jun 26, 2001
Semiconductor substrate manufacturing method
DENSO CORP326 citations98
US6495294B1Dec 17, 2002
Method for manufacturing semiconductor substrate having an epitaxial film in the trench
DENSO CORP117 citations97
US6534380B1Mar 18, 2003
Semiconductor substrate and method of manufacturing the same
DENSO CORP471 citations96
US6150697ANov 21, 2000
Semiconductor apparatus having high withstand voltage
DENSO CORP106 citations96
US7494594B2Feb 24, 2009
Method of manufacturing an electrostatic actuator
DENSO CORP2 citations61