Inventor
ANDERSON DON E
US4 patents
Patents
4 patentsUS6361414B1Mar 26, 2002
Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process
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US6622335B1Sep 23, 2003
Drip manifold for uniform chemical delivery
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US6711775B2Mar 30, 2004
System for cleaning a semiconductor wafer
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US6827793B2Dec 7, 2004
Drip manifold for uniform chemical delivery
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