Inventor
MAUERSBERGER FRANK
DE8 patents
⚠️ This page may combine multiple inventors who share the name “MAUERSBERGER FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
7 patentsUS6555479B1Apr 29, 2003
Method for forming openings for conductive interconnects
ADVANCED MICRO DEVICES INC31 citations92
US6489240B1Dec 3, 2002
Method for forming copper interconnects
ADVANCED MICRO DEVICES INC23 citations92
US6809032B1Oct 26, 2004
Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operation using optical techniques
ADVANCED MICRO DEVICES INC18 citations84
US6413846B1Jul 2, 2002
Contact each methodology and integration scheme
ADVANCED MICRO DEVICES INC15 citations84
US6514858B1Feb 4, 2003
Test structure for providing depth of polish feedback
ADVANCED MICRO DEVICES INC8 citations73
US6958247B2Oct 25, 2005
Method of electroplating copper over a patterned dielectric layer to enhance process uniformity of a subsequent CMP process
ADVANCED MICRO DEVICES INC10 citations72
US7030044B2Apr 18, 2006
Method of forming a cap layer having anti-reflective characteristics on top of a low-k dielectric
ADVANCED MICRO DEVICES INC4 citations62