Inventor
NGO TUAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “NGO TUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS5929717AJul 27, 1999
Method of and apparatus for minimizing plasma instability in an RF processor
LAM RES CORP163 citations98
US5982099ANov 9, 1999
Method of and apparatus for igniting a plasma in an r.f. plasma processor
LAM RES CORP109 citations97
US5689215ANov 18, 1997
Method of and apparatus for controlling reactive impedances of a matching network connected between an RF source and an RF plasma processor
LAM RES CORP137 citations96
US6060837AMay 9, 2000
Method of and apparatus for minimizing plasma instability in an rf processor
LAM RES CORP34 citations92
US6526355B1Feb 25, 2003
Integrated full wavelength spectrometer for wafer processing
LAM RES CORP23 citations91
US6622286B1Sep 16, 2003
Integrated electronic hardware for wafer processing control and diagnostic
LAM RES CORP20 citations87
US9659757B2May 23, 2017
Measuring and controlling wafer potential in pulsed RF bias processing
LAM RES CORP4 citations70