Inventor

KAVEH FARRO

US4 patents

⚠️ This page may combine multiple inventors who share the name “KAVEH FARRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US6526355B1Feb 25, 2003

Integrated full wavelength spectrometer for wafer processing

LAM RES CORP23 citations91

US6622286B1Sep 16, 2003

Integrated electronic hardware for wafer processing control and diagnostic

LAM RES CORP20 citations87

US5961724AOct 5, 1999

Techniques for reducing particulate contamination on a substrate during processing

LAM RES CORP1 citations50

KAVEH FARRO

1 patent

US8744624B1Jun 3, 2014

Substrate alignment system

KAVEH FARRO6 citations63