Inventor
WINNICZEK JAROSLAW W
US20 patents
⚠️ This page may combine multiple inventors who share the name “WINNICZEK JAROSLAW W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS6255221B1Jul 3, 2001
Methods for running a high density plasma etcher to achieve reduced transistor device damage
LAM RES CORP369 citations98
US8425682B2Apr 23, 2013
High strip rate downstream chamber
LAM RES CORP378 citations97
US6093332AJul 25, 2000
Methods for reducing mask erosion during plasma etching
LAM RES CORP46 citations96
US6489245B1Dec 3, 2002
Methods for reducing mask erosion during plasma etching
LAM RES CORP16 citations92
US6228278B1May 8, 2001
Methods and apparatus for determining an etch endpoint in a plasma processing system
LAM RES CORP28 citations89
US8043434B2Oct 25, 2011
Method and apparatus for removing photoresist
LAM RES CORP8 citations83
US6562187B2May 13, 2003
Methods and apparatus for determining an etch endpoint in a plasma processing system
LAM RES CORP16 citations81
US9865472B2Jan 9, 2018
Fabrication of a silicon structure and deep silicon etch with profile control
LAM RES CORP3 citations70
US7542134B2Jun 2, 2009
System, method and apparatus for in-situ substrate inspection
LAM RES CORP4 citations60
US7605063B2Oct 20, 2009
Photoresist stripping chamber and methods of etching photoresist on substrates
LAM RES CORP5 citations58
US7397555B2Jul 8, 2008
System, method and apparatus for in-situ substrate inspection
LAM RES CORP1 citations49
WINNICZEK JAROSLAW W
4 patentsUS8598037B2Dec 3, 2013
Silicon etch with passivation using plasma enhanced oxidation
WINNICZEK JAROSLAW W7 citations82
US8173547B2May 8, 2012
Silicon etch with passivation using plasma enhanced oxidation
WINNICZEK JAROSLAW W8 citations82
US9018098B2Apr 28, 2015
Silicon etch with passivation using chemical vapor deposition
WINNICZEK JAROSLAW W3 citations61
US8871105B2Oct 28, 2014
Method for achieving smooth side walls after Bosch etch process
WINNICZEK JAROSLAW W2 citations59