Inventor
SASAKI KIMIHIRO
JP2 patents
Patents
2 patentsUS6232242B1May 15, 2001
Method of forming a crystalline insulation layer on a silicon substrate
ROHM CO LTD98 citations94
US6683012B2Jan 27, 2004
Method for epitaxially growing crystalline insulation layer on crystalline silicon substrate while simultaneously growing silicon oxide, nitride, or oxynitride
ROHM CO LTD16 citations89