Inventor
GUARNIERI C RICHARD
US19 patents
⚠️ This page may combine multiple inventors who share the name “GUARNIERI C RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
17 patentsUS6420088B1Jul 16, 2002
Antireflective silicon-containing compositions as hardmask layer
IBM214 citations98
US6503692B2Jan 7, 2003
Antireflective silicon-containing compositions as hardmask layer
IBM85 citations97
US6420084B1Jul 16, 2002
Mask-making using resist having SIO bond-containing polymer
IBM83 citations97
US4686332AAug 11, 1987
Combined finger touch and stylus detection system for use on the viewing surface of a visual display device
IBM902 citations97
US5622635AApr 22, 1997
Method for enhanced inductive coupling to plasmas with reduced sputter contamination
IBM46 citations96
US5433812AJul 18, 1995
Apparatus for enhanced inductive coupling to plasmas with reduced sputter contamination
IBM61 citations96
US6436605B1Aug 20, 2002
Plasma resistant composition and use thereof
IBM31 citations92
US6171757B1Jan 9, 2001
Organometallic polymers and use thereof
IBM26 citations92
US6180291B1Jan 30, 2001
Static resistant reticle
IBM28 citations88
US6689540B2Feb 10, 2004
Polymers and use thereof
IBM7 citations74
US6458907B1Oct 1, 2002
Organometallic polymers and use thereof
IBM10 citations74
US4521442AJun 4, 1985
Radiant energy collector having plasma-textured polyimide exposed surface
IBM8 citations74
US5064681ANov 12, 1991
Selective deposition process for physical vapor deposition
IBM11 citations73
US6858357B2Feb 22, 2005
Attenuated embedded phase shift photomask blanks
IBM5 citations71
US6653027B2Nov 25, 2003
Attenuated embedded phase shift photomask blanks
IBM12 citations71
US4925700AMay 15, 1990
Process for fabricating high density disc storage device
IBM11 citations69
US6346362B1Feb 12, 2002
Polymers and use thereof
IBM0 citations52