Inventor
CHENG ZHI-YUAN
US5 patents
⚠️ This page may combine multiple inventors who share the name “CHENG ZHI-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
3 patentsUS6737670B2May 18, 2004
Semiconductor substrate structure
MASSACHUSETTS INST TECHNOLOGY90 citations98
US6573126B2Jun 3, 2003
Process for producing semiconductor article using graded epitaxial growth
MASSACHUSETTS INST TECHNOLOGY209 citations98
US6921914B2Jul 26, 2005
Process for producing semiconductor article using graded epitaxial growth
MASSACHUSETTS INST TECHNOLOGY49 citations95