Inventor
MAZZA FRANCESCO
IT4 patents
Patents
4 patentsUS6299746B1Oct 9, 2001
Getter system for purifying the confinement volume in process chambers
GETTERS SPA60 citations94
US6589599B1Jul 8, 2003
Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same
GETTERS SPA22 citations91
US6508632B1Jan 21, 2003
Getter system for purifying the confinement volume in process chambers
GETTERS SPA11 citations72
US6858254B2Feb 22, 2005
Easily loaded and unloaded getter device for reducing evacuation time and contamination in a vacuum chamber and method for use of same
GETTERS SPA5 citations61