Inventor
SHIM JOON-BUM
KR6 patents
Patents
6 patentsUS7326645B2Feb 5, 2008
Methods for forming copper interconnect of semiconductor devices
DONGBU ELECTRONICS CO LTD5 citations58
US7232746B2Jun 19, 2007
Method for forming dual damascene interconnection in semiconductor device
DONGBU ELECTRONICS CO LTD4 citations58
US7186649B2Mar 6, 2007
Submicron semiconductor device and a fabricating method thereof
DONGBU ELECTRONICS CO LTD4 citations58
US7595265B2Sep 29, 2009
Semiconductor device and method for forming a metal line in the semiconductor device
DONGBU ELECTRONICS CO LTD0 citations48
US7375028B2May 20, 2008
Method for manufacturing a semiconductor device
DONGBU ELECTRONICS CO LTD1 citations48
US7312157B2Dec 25, 2007
Methods and apparatus for cleaning semiconductor devices
DONGBU ELECTRONICS CO LTD1 citations48