Inventor
TABARA KATSUJI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “TABARA KATSUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
4 patentsUS5287290AFeb 15, 1994
Method and apparatus for checking a mask pattern
FUJITSU LTD23 citations90
US7242095B2Jul 10, 2007
Semiconductor device having a dummy pattern
FUJITSU LTD10 citations82
US5781656AJul 14, 1998
Method and apparatus for inspecting patterns composed of reticle data
FUJITSU LTD13 citations65
US6598185B1Jul 22, 2003
Pattern data inspection method and storage medium
FUJITSU LTD2 citations55