Inventor
LAI KEN KAUNG
US17 patents
⚠️ This page may combine multiple inventors who share the name “LAI KEN KAUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
15 patentsUS7211144B2May 1, 2007
Pulsed nucleation deposition of tungsten layers
APPLIED MATERIALS INC161 citations98
US6461435B1Oct 8, 2002
Showerhead with reduced contact area
APPLIED MATERIALS INC600 citations98
US7745333B2Jun 29, 2010
Methods for depositing tungsten layers employing atomic layer deposition techniques
APPLIED MATERIALS INC47 citations97
US7709385B2May 4, 2010
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC33 citations96
US7465665B2Dec 16, 2008
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC43 citations96
US7405158B2Jul 29, 2008
Methods for depositing tungsten layers employing atomic layer deposition techniques
APPLIED MATERIALS INC105 citations96
US7101795B1Sep 5, 2006
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer
APPLIED MATERIALS INC50 citations96
US7085616B2Aug 1, 2006
Atomic layer deposition apparatus
APPLIED MATERIALS INC42 citations96
US6797340B2Sep 28, 2004
Method for depositing refractory metal layers employing sequential deposition techniques
APPLIED MATERIALS INC167 citations95
US7695563B2Apr 13, 2010
Pulsed deposition process for tungsten nucleation
APPLIED MATERIALS INC38 citations92
US7220673B2May 22, 2007
Method for depositing tungsten-containing layers by vapor deposition techniques
APPLIED MATERIALS INC29 citations92
US8027746B2Sep 27, 2011
Atomic layer deposition apparatus
APPLIED MATERIALS INC4 citations74
US7860597B2Dec 28, 2010
Atomic layer deposition apparatus
APPLIED MATERIALS INC5 citations74
US7660644B2Feb 9, 2010
Atomic layer deposition apparatus
APPLIED MATERIALS INC4 citations74
US9031685B2May 12, 2015
Atomic layer deposition apparatus
APPLIED MATERIALS INC1 citations63