Inventor
SUTO YASUNARI
JP9 patents
Patents
9 patentsUS7670206B2Mar 2, 2010
Substrate polishing apparatus and substrate polishing method
EBARA CORP27 citations92
US7508201B2Mar 24, 2009
Eddy current sensor
EBARA CORP22 citations92
US6746319B2Jun 8, 2004
Measuring apparatus
EBARA CORP21 citations92
US7714572B2May 11, 2010
Method of detecting characteristics of films using eddy current
EBARA CORP14 citations91
US7078894B2Jul 18, 2006
Polishing device using eddy current sensor
EBARA CORP17 citations91
US7046001B2May 16, 2006
Frequency measuring device, polishing device using the same and eddy current sensor
EBARA CORP36 citations91
US7854646B2Dec 21, 2010
Substrate polishing apparatus and substrate polishing method
EBARA CORP12 citations84
US10134614B2Nov 20, 2018
Substrate peripheral portion measuring device, and substrate peripheral portion polishing apparatus
EBARA CORP2 citations69
US6935935B2Aug 30, 2005
Measuring apparatus
EBARA CORP2 citations62