Inventor
XAVIER ANTONIO
US7 patents
⚠️ This page may combine multiple inventors who share the name “XAVIER ANTONIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS11661654B2May 30, 2023
Substrate processing systems including gas delivery system with reduced dead legs
LAM RES CORP2 citations68
US11332824B2May 17, 2022
Systems and methods for reducing effluent build-up in a pumping exhaust system
LAM RES CORP3 citations68
US10294560B2May 21, 2019
High-conductance, non-sealing throttle valve with projections and stop surfaces
LAM RES CORP1 citations59
US12049698B2Jul 30, 2024
Systems and methods for reducing effluent build-up in a pumping exhaust system
LAM RES CORP0 citations57
US11959172B2Apr 16, 2024
Substrate processing systems including gas delivery system with reduced dead legs
LAM RES CORP0 citations57