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Inventor
SHIN CHEOLMIN
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “SHIN CHEOLMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SK HYNIX INC
1 patent
US12428581B2
Sep 30, 2025
Chemical mechanical polishing slurry composition for polishing boron silicon compound, chemical mechanical polishing method and method of fabricating semiconductor device using the same
SK HYNIX INC
0 citations
54
SAMSUNG ELECTRONICS CO LTD
1 patent
US12122702B2
Oct 22, 2024
Ultrapure water supply apparatus, substrate processing system including the same, and substrate processing method using the same
SAMSUNG ELECTRONICS CO LTD
0 citations
38