Inventor
MEGAWA YASUHIRO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MEGAWA YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
3 patentsUS7682987B2Mar 23, 2010
Device for processing substrate and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC8 citations83
US8003411B2Aug 23, 2011
Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device
HITACHI INT ELECTRIC INC1 citations62
US7713883B2May 11, 2010
Manufacturing method of a semiconductor device, and substrate processing apparatus
HITACHI INT ELECTRIC INC5 citations61
KOKUSAI ELECTRIC CORP
3 patentsUS10840094B2Nov 17, 2020
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP4 citations71
US12435439B2Oct 7, 2025
Substrate processing method, method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus
KOKUSAI ELECTRIC CORP0 citations59
US12503762B2Dec 23, 2025
Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations48
YUASA KAZUHIRO
2 patentsUS8901013B2Dec 2, 2014
Substrate processing apparatus, method of processing substrate and method of manufacturing semiconductor device
YUASA KAZUHIRO2 citations61
US8448599B2May 28, 2013
Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device
YUASA KAZUHIRO2 citations61