Inventor

MURAI SHIAKI

JP3 patents

Patents

3 patents

US5757019AMay 26, 1998

Pattern drawing apparatus

DAINIPPON PRINTING CO LTD8 citations70

US6879393B2Apr 12, 2005

Defect inspection apparatus for phase shift mask

DAINIPPON PRINTING CO LTD10 citations68

US6803584B2Oct 12, 2004

Electron beam control device

DAINIPPON PRINTING CO LTD0 citations48