Inventor
LAHNOR PETER
DE12 patents
⚠️ This page may combine multiple inventors who share the name “LAHNOR PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
7 patentsUS6153492ANov 28, 2000
Method for improving the readability of alignment marks
INFINEON TECHNOLOGIES AG33 citations91
US6695687B2Feb 24, 2004
Semiconductor substrate holder for chemical-mechanical polishing containing a movable plate
INFINEON TECHNOLOGIES AG18 citations81
US6689691B2Feb 10, 2004
Method of simultaneously polishing a plurality of objects of a similar type, in particular silicon wafers, on a polishing installation
INFINEON TECHNOLOGIES AG6 citations61
US6893968B2May 17, 2005
Defect-minimizing, topology-independent planarization of process surfaces in semiconductor devices
INFINEON TECHNOLOGIES AG0 citations51
US6787431B2Sep 7, 2004
Method and semiconductor wafer configuration for producing an alignment mark for semiconductor wafers
INFINEON TECHNOLOGIES AG0 citations50
US6827635B2Dec 7, 2004
Method of planarizing substrates
INFINEON TECHNOLOGIES AG0 citations49
US6821894B2Nov 23, 2004
CMP process
INFINEON TECHNOLOGIES AG0 citations40