Inventor
SCHAUER RONALD VERN
US29 patents
⚠️ This page may combine multiple inventors who share the name “SCHAUER RONALD VERN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
21 patentsUS6763281B2Jul 13, 2004
Apparatus for alignment of automated workpiece handling systems
APPLIED MATERIALS INC43 citations92
US7158857B2Jan 2, 2007
Method and apparatus for aligning a cassette
APPLIED MATERIALS INC35 citations90
US6925356B2Aug 2, 2005
Method and apparatus for aligning a cassette
APPLIED MATERIALS INC37 citations90
US7063301B2Jun 20, 2006
Facilities connection bucket for pre-facilitation of wafer fabrication equipment
APPLIED MATERIALS INC11 citations84
US6851170B2Feb 8, 2005
Method and apparatus for alignment of carriers, carrier handlers and semiconductor handling equipment
APPLIED MATERIALS INC12 citations84
US7112812B2Sep 26, 2006
Optical measurement apparatus
APPLIED MATERIALS INC7 citations74
US10974363B2Apr 13, 2021
Monitoring of pneumatic connection to carrier head
APPLIED MATERIALS INC1 citations73
US10153143B2Dec 11, 2018
Smart chamber and smart chamber components
APPLIED MATERIALS INC3 citations71
US9779917B2Oct 3, 2017
Process chamber gas flow improvements
APPLIED MATERIALS INC3 citations71
US10452111B2Oct 22, 2019
Enhanced re-hosting capability for legacy hardware and software
APPLIED MATERIALS INC1 citations70
US9383739B2Jul 5, 2016
Enhanced re-hosting capability for legacy hardware and software
APPLIED MATERIALS INC3 citations70
US9987718B2Jun 5, 2018
Pneumatic connection to carrier head
APPLIED MATERIALS INC1 citations63
US9168629B2Oct 27, 2015
Detecting membrane breakage in a carrier head
APPLIED MATERIALS INC2 citations63
US8346980B2Jan 1, 2013
Modular input/output bridge system for semiconductor processing equipment
APPLIED MATERIALS INC2 citations63
US7835007B2Nov 16, 2010
Methods and apparatus for identifying thin films on a substrate
APPLIED MATERIALS INC2 citations63
US10930479B2Feb 23, 2021
Smart chamber and smart chamber components
APPLIED MATERIALS INC0 citations61
US11069051B2Jul 20, 2021
Transparent wafer center finder
APPLIED MATERIALS INC0 citations52
US8994950B2Mar 31, 2015
Methods and apparatus for sensing a substrate in a chamber
APPLIED MATERIALS INC1 citations52
US10037064B2Jul 31, 2018
Enhanced re-hosting capability for legacy hardware and software
APPLIED MATERIALS INC1 citations49
US9892947B2Feb 13, 2018
Sensor system for semiconductor manufacturing apparatus
APPLIED MATERIALS INC0 citations47
US10564609B2Feb 18, 2020
Controller for treatment of semiconductor processing equipment effluent
APPLIED MATERIALS INC0 citations42
SCHAUER RONALD VERN
6 patentsUS8649017B2Feb 11, 2014
Methods and apparatus for sensing a substrate in a chamber
SCHAUER RONALD VERN5 citations83
US8135560B2Mar 13, 2012
Sensor system for semiconductor manufacturing apparatus
SCHAUER RONALD VERN9 citations78
US8539257B2Sep 17, 2013
Method and apparatus for detecting an idle mode of processing equipment
SCHAUER RONALD VERN4 citations62
US8255606B2Aug 28, 2012
Remote access gateway for semiconductor processing equipment
SCHAUER RONALD VERN2 citations62
US9243319B2Jan 26, 2016
Sensor system for semiconductor manufacturing apparatus
SCHAUER RONALD VERN1 citations57
US8333939B2Dec 18, 2012
High temperature optical sensor device for substrate fabrication equipment
SCHAUER RONALD VERN1 citations51