Inventor
CHAPPELOW RONALD E
US3 patents
Patents
3 patentsUS4757207AJul 12, 1988
Measurement of registration of overlaid test patterns by the use of reflected light
IBM184 citations94
US5325180AJun 28, 1994
Apparatus for identifying and distinguishing temperature and system induced measuring errors
IBM31 citations90
US4132818AJan 2, 1979
Method of forming deposits from reactive gases
IBM11 citations64