Inventor
UMEMURA MITSUO
JP11 patents
Patents
11 patentsUS5773200AJun 30, 1998
Positive resist composition suitable for lift-off technique and pattern forming method
SHINETSU CHEMICAL CO22 citations92
US5541037AJul 30, 1996
Anti-reflective material and patterning method
SHINETSU CHEMICAL CO68 citations92
US5422221AJun 6, 1995
Resist compositions
SHINETSU CHEMICAL CO28 citations92
US4771118ASep 13, 1988
Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers
SHINETSU CHEMICAL CO20 citations81
US4089882AMay 16, 1978
Method of preparing fluoroalkyl-containing organosilanes
SHINETSU CHEMICAL CO23 citations79
US5086127AFeb 4, 1992
Silicone UV absorbers containing silane units
SHINETSU CHEMICAL CO17 citations73
US4870115ASep 26, 1989
Foamable silicone rubber composition
SHINETSU CHEMICAL CO9 citations73
US4461908AJul 24, 1984
Method for the preparation of methyl hydrogensilanes
SHINETSU CHEMICAL CO9 citations73
US4870035ASep 26, 1989
Process for manufacturing organic silazane polymers and process for manufacturing ceramics from the polymers
SHINETSU CHEMICAL CO7 citations72
US5795700AAug 18, 1998
Method for forming resist pattern with enhanced contrast film
SHINETSU CHEMICAL CO5 citations63
US4243607AJan 6, 1981
Process for the preparation of tetrachloroalkanes
SHINETSU CHEMICAL CO5 citations60