Inventor
GAILLARD FREDERIC
FR43 patents
⚠️ This page may combine multiple inventors who share the name “GAILLARD FREDERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
22 patentsUS7326657B2Feb 5, 2008
Post-deposition treatment to enhance properties of Si-O-C low k films
APPLIED MATERIALS INC524 citations99
US6635575B1Oct 21, 2003
Methods and apparatus to enhance properties of Si-O-C low K films
APPLIED MATERIALS INC150 citations99
US6632478B2Oct 14, 2003
Process for forming a low dielectric constant carbon-containing film
APPLIED MATERIALS INC658 citations99
US6627532B1Sep 30, 2003
Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition
APPLIED MATERIALS INC358 citations99
US6413583B1Jul 2, 2002
Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound
APPLIED MATERIALS INC725 citations99
US6602806B1Aug 5, 2003
Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film
APPLIED MATERIALS INC549 citations98
US6486061B1Nov 26, 2002
Post-deposition treatment to enhance properties of Si-O-C low K films
APPLIED MATERIALS INC83 citations98
US6465372B1Oct 15, 2002
Surface treatment of C-doped SiO2 film to enhance film stability during O2 ashing
APPLIED MATERIALS INC101 citations98
US6583497B2Jun 24, 2003
Surface treatment of c-doped SiO2 film to enhance film stability during O2 ashing
APPLIED MATERIALS INC46 citations96
US6500773B1Dec 31, 2002
Method of depositing organosilicate layers
APPLIED MATERIALS INC63 citations96
US6733955B1May 11, 2004
Methods for forming self-planarized dielectric layer for shallow trench isolation
APPLIED MATERIALS INC59 citations95
US6897163B2May 24, 2005
Method for depositing a low dielectric constant film
APPLIED MATERIALS INC21 citations93
US6531398B1Mar 11, 2003
Method of depositing organosillicate layers
APPLIED MATERIALS INC34 citations93
US6875558B1Apr 5, 2005
Integration scheme using self-planarized dielectric layer for shallow trench isolation (STI)
APPLIED MATERIALS INC26 citations92
US6858923B2Feb 22, 2005
Post-deposition treatment to enhance properties of Si-O-C low films
APPLIED MATERIALS INC17 citations92
US6784119B2Aug 31, 2004
Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition
APPLIED MATERIALS INC36 citations92
US6472333B2Oct 29, 2002
Silicon carbide cap layers for low dielectric constant silicon oxide layers
APPLIED MATERIALS INC26 citations91
US6753258B1Jun 22, 2004
Integration scheme for dual damascene structure
APPLIED MATERIALS INC39 citations90
US6703321B2Mar 9, 2004
Low thermal budget solution for PMD application using sacvd layer
APPLIED MATERIALS INC18 citations83
US7074708B2Jul 11, 2006
Method of decreasing the k value in sioc layer deposited by chemical vapor deposition
APPLIED MATERIALS INC8 citations74
US6753270B1Jun 22, 2004
Process for depositing a porous, low dielectric constant silicon oxide film
APPLIED MATERIALS INC9 citations72
US6750141B2Jun 15, 2004
Silicon carbide cap layers for low dielectric constant silicon oxide layers
APPLIED MATERIALS INC1 citations51
COMMISSARIAT ENERGIE ATOMIQUE
11 patentsUS7989056B2Aug 2, 2011
Hydrophobic surface coating with low wetting hysteresis, method for depositing same, microcomponent and use
COMMISSARIAT ENERGIE ATOMIQUE89 citations97
US7939195B2May 10, 2011
Structured electrolyte for micro-battery
COMMISSARIAT ENERGIE ATOMIQUE21 citations92
US7868243B2Jan 11, 2011
Method for producing a nanostructure based on interconnected nanowires, nanostructure and use as thermoelectric converter
COMMISSARIAT ENERGIE ATOMIQUE20 citations91
US7858262B2Dec 28, 2010
Fuel cell comprising a plurality of individual cells connected in series by current collectors
COMMISSARIAT ENERGIE ATOMIQUE13 citations81
US7695531B2Apr 13, 2010
Method for producing a lithium microbattery
COMMISSARIAT ENERGIE ATOMIQUE5 citations60
US7488536B2Feb 10, 2009
Coating for a mechanical part, comprising at least one hydrogenated amorphous carbon, and method of depositing one such coating
COMMISSARIAT ENERGIE ATOMIQUE2 citations60
US7473381B2Jan 6, 2009
Method for hydrogen production
COMMISSARIAT ENERGIE ATOMIQUE1 citations60
US9966879B2May 8, 2018
Thermal energy harvesting optimization with bistable elements and collaborative behavior
COMMISSARIAT ENERGIE ATOMIQUE0 citations52
US7807279B2Oct 5, 2010
Integrated microcomponent combining energy recovery and storage functions
COMMISSARIAT ENERGIE ATOMIQUE1 citations51
US7763233B2Jul 27, 2010
Hydrogen generator and fuel cell using same
COMMISSARIAT ENERGIE ATOMIQUE0 citations49
US7740989B2Jun 22, 2010
Micro fuel cell with an electrolytic membrane reinforced by an anchoring element and method for production of a micro fuel cell
COMMISSARIAT ENERGIE ATOMIQUE0 citations49