Inventor
GEIGER FABRICE
FR5 patents
Patents
5 patentsUS6602806B1Aug 5, 2003
Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film
APPLIED MATERIALS INC549 citations98
US6733955B1May 11, 2004
Methods for forming self-planarized dielectric layer for shallow trench isolation
APPLIED MATERIALS INC59 citations95
US6875558B1Apr 5, 2005
Integration scheme using self-planarized dielectric layer for shallow trench isolation (STI)
APPLIED MATERIALS INC26 citations92
US6703321B2Mar 9, 2004
Low thermal budget solution for PMD application using sacvd layer
APPLIED MATERIALS INC18 citations83
US6753270B1Jun 22, 2004
Process for depositing a porous, low dielectric constant silicon oxide film
APPLIED MATERIALS INC9 citations72