Inventor
NISHIMURA TOSHIHARU
JP17 patents
⚠️ This page may combine multiple inventors who share the name “NISHIMURA TOSHIHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS5637153AJun 10, 1997
Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus
TOKYO ELECTRON LTD351 citations98
US5503875AApr 2, 1996
Film forming method wherein a partial pressure of a reaction byproduct in a processing container is reduced temporarily
TOKYO ELECTRON LTD733 citations98
US5380370AJan 10, 1995
Method of cleaning reaction tube
TOKYO ELECTRON LTD56 citations96
US5294262AMar 15, 1994
Method of cleaning a process tube with ClF3 gas and controlling the temperature of process
TOKYO ELECTRON LTD51 citations92
US5622566AApr 22, 1997
Film-forming apparatus
TOKYO ELECTRON LTD32 citations91
US6110286AAug 29, 2000
Vertical processing unit
TOKYO ELECTRON LTD8 citations74
US5654230AAug 5, 1997
Method of forming doped film
TOKYO ELECTRON LTD17 citations71
US5677235AOct 14, 1997
Method for forming silicon film
TOKYO ELECTRON LTD4 citations63
US7691445B2Apr 6, 2010
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD0 citations42
US7470637B2Dec 30, 2008
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD0 citations42
US7923357B2Apr 12, 2011
Method for forming poly-silicon film
TOKYO ELECTRON LTD0 citations41
US7959737B2Jun 14, 2011
Film formation apparatus and method for using the same
TOKYO ELECTRON LTD0 citations40
KONISHIROKU PHOTO IND
3 patentsUS4872033AOct 3, 1989
Image forming apparatus capable of processing various kinds of photosensitive material
KONISHIROKU PHOTO IND22 citations81
US5065441ANov 12, 1991
Image processing apparatus
KONISHIROKU PHOTO IND8 citations73
US4774547ASep 27, 1988
Apparatus for forming images
KONISHIROKU PHOTO IND7 citations73