Inventor
AOKI YASUO
JP47 patents
⚠️ This page may combine multiple inventors who share the name “AOKI YASUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
29 patentsUS6559928B1May 6, 2003
Substrate supporting apparatus, substrate transfer apparatus and the transfer method, method of holding the substrate, exposure apparatus and the method of manufacturing the apparatus
NIKON CORP51 citations96
US5729255AMar 17, 1998
Image edit method and apparatus having alarm indication
NIKON CORP29 citations92
US10725389B2Jul 28, 2020
Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP6 citations84
US9250543B2Feb 2, 2016
Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP4 citations84
US9170504B2Oct 27, 2015
Movable body apparatus, exposure apparatus and device manufacturing method
NIKON CORP4 citations84
US11774864B2Oct 3, 2023
Carrier device, exposure apparatus, exposure method, manufacturing method of flat-panel display, device manufacturing method, and carrying method
NIKON CORP6 citations75
US11520242B2Dec 6, 2022
Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method
NIKON CORP2 citations73
US10852647B2Dec 1, 2020
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method , and device manufacturing method
NIKON CORP3 citations73
US10649348B2May 12, 2020
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP2 citations73
US10514616B2Dec 24, 2019
Movable body apparatus, exposure apparatus and device manufacturing method
NIKON CORP2 citations73
US9977345B2May 22, 2018
Movable body apparatus, exposure apparatus and device manufacturing method
NIKON CORP2 citations73
US10752449B2Aug 25, 2020
Object carrier device, exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, object carrying method, and exposure method
NIKON CORP4 citations71
US5655419AAug 12, 1997
Handle apparatus
NIKON CORP4 citations63
US11402762B2Aug 2, 2022
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP0 citations62
US11187999B2Nov 30, 2021
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP0 citations62
US10983438B2Apr 20, 2021
Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method
NIKON CORP0 citations62
US10935894B2Mar 2, 2021
Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object
NIKON CORP1 citations62
US10802407B2Oct 13, 2020
Exposure apparatus, exposure method, manufacturing method of flat-panel display, and device manufacturing method
NIKON CORP1 citations62
US10670977B2Jun 2, 2020
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP1 citations62
US10564548B2Feb 18, 2020
Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method
NIKON CORP1 citations62
US10520834B2Dec 31, 2019
Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object
NIKON CORP1 citations62
US10627725B2Apr 21, 2020
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method
NIKON CORP0 citations52
US10409176B2Sep 10, 2019
Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP0 citations52
US10228625B2Mar 12, 2019
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method
NIKON CORP0 citations52
US9921496B2Mar 20, 2018
Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP0 citations52
US9500963B2Nov 22, 2016
Movable body apparatus, exposure apparatus and device manufacturing method
NIKON CORP0 citations52
US11126094B2Sep 21, 2021
Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method
NIKON CORP0 citations43
US10782619B2Sep 22, 2020
Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method
NIKON CORP0 citations42
US10534277B2Jan 14, 2020
Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, and device manufacturing method
NIKON CORP0 citations42
DAINIPPON INK & CHEMICALS
7 patentsUS5525595AJun 11, 1996
3- or 4-glycosyloxybenzopyran derivative and antiallergic agent containing the derivative as active ingredient
DAINIPPON INK & CHEMICALS11 citations74
US5981495ANov 9, 1999
Benzopyran derivative and method for treating heart disease using this derivative
DAINIPPON INK & CHEMICALS7 citations73
US5580552ADec 3, 1996
7-glycosyloxybenzopyran derivative and antiallergic agent containing the derivative as active ingredient
DAINIPPON INK & CHEMICALS5 citations63
US6242425B1Jun 5, 2001
Quinolinone glycoside, production process, and anti-allergic agent
DAINIPPON INK & CHEMICALS3 citations62
US6114352ASep 5, 2000
Quinolinone derivative and anti-allergic agent with said quinolinone derivative as the active ingredient
DAINIPPON INK & CHEMICALS3 citations62
US5942521AAug 24, 1999
Quinolinone derivative and anti-allergic agent with said quinolinone derivative as the active ingredient
DAINIPPON INK & CHEMICALS4 citations62
US6670391B2Dec 30, 2003
Benzopyran derivative and antiallergic agent
DAINIPPON INK & CHEMICALS0 citations50
AOKI YASUO
6 patentsUS8988655B2Mar 24, 2015
Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method
AOKI YASUO5 citations83
US8598538B2Dec 3, 2013
Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
AOKI YASUO3 citations62
US8699001B2Apr 15, 2014
Object moving apparatus, object processing apparatus, exposure apparatus, object inspecting apparatus and device manufacturing method
AOKI YASUO2 citations61
US9366974B2Jun 14, 2016
Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method
AOKI YASUO0 citations51
US8659746B2Feb 25, 2014
Movable body apparatus, exposure apparatus and device manufacturing method
AOKI YASUO0 citations51
US8395758B2Mar 12, 2013
Exposure apparatus and device manufacturing method
AOKI YASUO0 citations51
SHIRASU HIROSHI
2 patentsUS8704431B2Apr 22, 2014
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
SHIRASU HIROSHI1 citations48
US8531093B2Sep 10, 2013
Discharge lamp, light source apparatus, exposure apparatus, and exposure apparatus manufacturing method
SHIRASU HIROSHI1 citations48