Inventor
YOO HYUNG JOUN
KR12 patents
Patents
12 patentsUS5810935ASep 22, 1998
Apparatus for transferring a wafer
KOREA ELECTRONICS TELECOMM160 citations97
US5783749AJul 21, 1998
Vibrating disk type micro-gyroscope
KOREA ELECTRONICS TELECOMM113 citations96
US6292084B1Sep 18, 2001
Fine inductor having 3-dimensional coil structure and method for producing the same
KOREA ELECTRONICS TELECOMM25 citations92
US5939833AAug 17, 1999
Field emission device with low driving voltage
KOREA ELECTRONICS TELECOMM31 citations92
US5843837ADec 1, 1998
Method of contact hole burying
KOREA ELECTRONICS TELECOMM29 citations92
US5543253AAug 6, 1996
Photomask for t-gate formation and process for fabricating the same
KOREA ELECTRONICS TELECOMM36 citations91
US6137219AOct 24, 2000
Field emission display
KOREA ELECTRONICS TELECOMM11 citations74
US5677089AOct 14, 1997
Photomask for forming T-gate electrode of the semiconductor device
KOREA ELECTRONICS TELECOMM13 citations72
US5878105AMar 2, 1999
X-ray mask
KOREA ELECTRONICS TELECOMM5 citations62
US6101047AAug 8, 2000
Catadioptric optical system for lithography
KOREA ELECTRONICS TELECOMM5 citations60
US5953580ASep 14, 1999
Method of manufacturing a vacuum device
KOREA ELECTRONICS TELECOMM1 citations52
US5796804AAug 18, 1998
X-ray mask structure for reducing the distortion of a mask
KOREA ELECTRONICS TELECOMM0 citations51