Inventor
HSIEH CHIEN-SHENG
TW3 patents
Patents
3 patentsUS6159839ADec 12, 2000
Method for fabricating borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections
VANGUARD INT SEMICONDUCT CORP146 citations97
US6476488B1Nov 5, 2002
Method for fabricating borderless and self-aligned polysilicon and metal contact landing plugs for multilevel interconnections
VANGUARD INT SEMICONDUCT CORP49 citations94
US6248643B1Jun 19, 2001
Method of fabricating a self-aligned contact
VANGUARD INT SEMICONDUCT CORP25 citations91