Inventor
DELLAGUARDIA RONALD A
US11 patents
⚠️ This page may combine multiple inventors who share the name “DELLAGUARDIA RONALD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS6042997AMar 28, 2000
Copolymers and photoresist compositions comprising copolymer resin binder component
IBM115 citations97
US6103447AAug 15, 2000
Approach to formulating irradiation sensitive positive resists
IBM25 citations92
US6207353B1Mar 27, 2001
Resist formulation which minimizes blistering during etching
IBM28 citations90
US6074800AJun 13, 2000
Photo acid generator compounds, photo resists, and method for improving bias
IBM16 citations81
US5264328ANov 23, 1993
Resist development endpoint detection for X-ray lithography
IBM17 citations73
US6268436B1Jul 31, 2001
Approach to formulating irradiation sensitive positive resists
IBM9 citations71
US7253100B2Aug 7, 2007
Reducing damage to ulk dielectric during cross-linked polymer removal
IBM5 citations63
US7598169B2Oct 6, 2009
Method to remove beol sacrificial materials and chemical residues by irradiation
IBM1 citations52