Inventor
MATSUSHITA MITIAKI
JP6 patents
Patents
6 patentsUS6074154AJun 13, 2000
Substrate treatment system, substrate transfer system, and substrate transfer method
TOKYO ELECTRON LTD457 citations99
US6439822B1Aug 27, 2002
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD540 citations98
US6425722B1Jul 30, 2002
Substrate treatment system, substrate transfer system, and substrate transfer method
TOKYO ELECTRON LTD54 citations96
US5685039ANov 11, 1997
Cleaning apparatus
TOKYO ELECTRON LTD51 citations92
US6746197B2Jun 8, 2004
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD14 citations84
US6655891B2Dec 2, 2003
Substrate treatment system, substrate transfer system, and substrate transfer method
TOKYO ELECTRON LTD13 citations84