Inventor
UEMURA RYOUICHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “UEMURA RYOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7780366B2Aug 24, 2010
Resist pattern forming method
TOKYO ELECTRON LTD22 citations92
US7488127B2Feb 10, 2009
Resist pattern forming apparatus and method thereof
TOKYO ELECTRON LTD16 citations92
US6984477B2Jan 10, 2006
Resist pattern forming apparatus and method thereof
TOKYO ELECTRON LTD25 citations92
US6457882B2Oct 1, 2002
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD19 citations92
US6990380B2Jan 24, 2006
Substrate processing apparatus and information storage apparatus and method
TOKYO ELECTRON LTD8 citations73
US6974963B2Dec 13, 2005
Substrate inspecting device, coating/developing device and substrate inspecting method
TOKYO ELECTRON LTD7 citations69
US7031792B2Apr 18, 2006
Processing apparatus and information storage apparatus and method
TOKYO ELECTRON LTD4 citations62
US6766209B2Jul 20, 2004
Managing system, managing method, host computer, and information collecting/transmitting unit
TOKYO ELECTRON LTD5 citations58