Inventor
SAWIN HERBERT HAROLD
US2 patents
Patents
2 patentsUS7037846B2May 2, 2006
Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing
AXCELIS TECH INC98 citations93
US6761796B2Jul 13, 2004
Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing
AXCELIS TECH INC75 citations93