Inventor
CHANG CHAO-JUNG
TW4 patents
Patents
4 patentsUS6926584B2Aug 9, 2005
Dual mode hybrid control and method for CMP slurry
TAIWAN SEMICONDUCTOR MFG12 citations80
US6860723B2Mar 1, 2005
Slurry flow control and monitor system for chemical mechanical polisher
TAIWAN SEMICONDUCTOR MFG9 citations67
US6884149B2Apr 26, 2005
Method and system for in-situ monitoring of mixing ratio of high selectivity slurry
TAIWAN SEMICONDUCTOR MFG0 citations50
US6729935B2May 4, 2004
Method and system for in-situ monitoring of mixing ratio of high selectivity slurry
TAIWAN SEMICONDUCTOR MFG0 citations50