Inventor
PENG CHIN-HSIN
TW5 patents
Patents
5 patentsUS6926584B2Aug 9, 2005
Dual mode hybrid control and method for CMP slurry
TAIWAN SEMICONDUCTOR MFG12 citations80
US6896304B2May 24, 2005
Automatic sensing wafer blade and method for using
TAIWAN SEMICONDUCTOR MFG18 citations77
US6860723B2Mar 1, 2005
Slurry flow control and monitor system for chemical mechanical polisher
TAIWAN SEMICONDUCTOR MFG9 citations67
US6843264B2Jan 18, 2005
Multi-phase pressure control valve for process chamber
TAIWAN SEMICONDUCTOR MFG10 citations67
US6733373B1May 11, 2004
Polishing assembly for a linear chemical mechanical polishing apparatus and method for forming
TAIWAN SEMICONDUCTOR MFG6 citations58