Inventor

LO JUI-CHENG

TW5 patents

⚠️ This page may combine multiple inventors who share the name “LO JUI-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

3 patents

US6926584B2Aug 9, 2005

Dual mode hybrid control and method for CMP slurry

TAIWAN SEMICONDUCTOR MFG12 citations80

US6860723B2Mar 1, 2005

Slurry flow control and monitor system for chemical mechanical polisher

TAIWAN SEMICONDUCTOR MFG9 citations67

US7125521B2Oct 24, 2006

Method to solve alignment mark blinded issues and technology for application of semiconductor etching at a tiny area

TAIWAN SEMICONDUCTOR MFG0 citations50

VANGUARD INT SEMICONDUCT CORP

2 patents

US5726102AMar 10, 1998

Method for controlling etch bias in plasma etch patterning of integrated circuit layers

VANGUARD INT SEMICONDUCT CORP34 citations89

US5667630ASep 16, 1997

Low charge-up reactive ion metal etch process

VANGUARD INT SEMICONDUCT CORP26 citations89