Inventor
HUANG CHIEN-LING
TW3 patents
Patents
3 patentsUS6926584B2Aug 9, 2005
Dual mode hybrid control and method for CMP slurry
TAIWAN SEMICONDUCTOR MFG12 citations80
US6896304B2May 24, 2005
Automatic sensing wafer blade and method for using
TAIWAN SEMICONDUCTOR MFG18 citations77
US6843264B2Jan 18, 2005
Multi-phase pressure control valve for process chamber
TAIWAN SEMICONDUCTOR MFG10 citations67