Inventor
HAGA KAZUMI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HAGA KAZUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEW CREATION CO LTD
6 patentsUS5737074AApr 7, 1998
Surface inspection method and apparatus
NEW CREATION CO LTD98 citations95
US5745236AApr 28, 1998
Optical inspecting apparatus having a focusing system with a telecentric optical system and an aperture stop
NEW CREATION CO LTD54 citations94
US5583632ADec 10, 1996
Apparatus for two or three dimensional optical inspection of a sample
NEW CREATION CO LTD65 citations94
US5715050AFeb 3, 1998
Optical inspection apparatus including a telecentric optical system, an aperture stop and a screen
NEW CREATION CO LTD26 citations91
US5523846AJun 4, 1996
Apparatus for detecting marks formed on a sample surface
NEW CREATION CO LTD17 citations72
US5757479AMay 26, 1998
Optical inspection apparatus
NEW CREATION CO LTD6 citations61
NEWCREATION CO LTD
3 patentsUS6317204B2Nov 13, 2001
Surface inspecting device and surface inspecting method
NEWCREATION CO LTD11 citations66
US6356399B1Mar 12, 2002
Light projecting method, surface inspection method, and apparatus used to implement these methods
NEWCREATION CO LTD6 citations56
US6621567B1Sep 16, 2003
Surface inspecting method and surface inspecting device
NEWCREATION CO LTD0 citations45