Inventor
FRANKLIN TIMOTHY J
US13 patents
⚠️ This page may combine multiple inventors who share the name “FRANKLIN TIMOTHY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6267853B1Jul 31, 2001
Electro-chemical deposition system
APPLIED MATERIALS INC211 citations96
US6571657B1Jun 3, 2003
Multiple blade robot adjustment apparatus and associated method
APPLIED MATERIALS INC29 citations92
US6568896B2May 27, 2003
Transfer chamber with side wall port
APPLIED MATERIALS INC20 citations92
US6503131B1Jan 7, 2003
Integrated platen assembly for a chemical mechanical planarization system
APPLIED MATERIALS INC31 citations92
US10854483B2Dec 1, 2020
High pressure steam anneal processing apparatus
APPLIED MATERIALS INC15 citations84
US7114693B1Oct 3, 2006
Stable cell platform
APPLIED MATERIALS INC17 citations84
US6837964B2Jan 4, 2005
Integrated platen assembly for a chemical mechanical planarization system
APPLIED MATERIALS INC4 citations62
US6361674B1Mar 26, 2002
Powered lift for ECP chamber
APPLIED MATERIALS INC4 citations62
US11270905B2Mar 8, 2022
Modulating film properties by optimizing plasma coupling materials
APPLIED MATERIALS INC0 citations61
US12221694B2Feb 11, 2025
Conditioning of a processing chamber
APPLIED MATERIALS INC0 citations51