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Inventor
KOHL IAN T
US
3 patents
⚠️ This page may combine multiple inventors who share the name “KOHL IAN T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JUDELL NEIL
2 patents
US8059268B2
Nov 15, 2011
Inspecting a workpiece using polarization of scattered light
JUDELL NEIL
3 citations
71
US8537350B2
Sep 17, 2013
Inspecting a workpiece using scattered light
JUDELL NEIL
1 citations
60
KLA TENCOR CORP
1 patent
US9518930B2
Dec 13, 2016
Scattered light measurement system
KLA TENCOR CORP
0 citations
60