P

Inventor

GAO SONGPING

US10 patents
⚠️ This page may combine multiple inventors who share the name “GAO SONGPING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

4 patents
US7623227B2Nov 24, 2009

System and method for inspecting a workpiece surface using polarization of scattered light

KLA TENCOR CORP11 citations89
US7557910B2Jul 7, 2009

System and method for controlling a beam source in a workpiece surface inspection system

KLA TENCOR CORP6 citations78
US7839495B2Nov 23, 2010

System and method for controlling a beam source in a workpiece surface inspection system

KLA TENCOR CORP3 citations70
US9518930B2Dec 13, 2016

Scattered light measurement system

KLA TENCOR CORP0 citations60

GAO SONGPING

3 patents
US8427637B2Apr 23, 2013

Optical detection system

GAO SONGPING5 citations69
US8624200B2Jan 7, 2014

Optical detection system

GAO SONGPING0 citations48
US9110023B2Aug 18, 2015

Optical system

GAO SONGPING0 citations38

JUDELL NEIL

2 patents
US8059268B2Nov 15, 2011

Inspecting a workpiece using polarization of scattered light

JUDELL NEIL3 citations71
US8537350B2Sep 17, 2013

Inspecting a workpiece using scattered light

JUDELL NEIL1 citations60

ADE OPTICAL SYST CORP

1 patent
US6122047ASep 19, 2000

Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate

ADE OPTICAL SYST CORP37 citations90