Inventor
NAKASHIMA HIROMITSU
JP31 patents
⚠️ This page may combine multiple inventors who share the name “NAKASHIMA HIROMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
17 patentsUS11681222B2Jun 20, 2023
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations61
US11036133B2Jun 15, 2021
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations61
US9268219B2Feb 23, 2016
Photoresist composition and resist pattern-forming method
JSR CORP2 citations61
US9116427B2Aug 25, 2015
Composition for forming resist underlayer film and pattern-forming method
JSR CORP2 citations61
US9046765B2Jun 2, 2015
Resist pattern-forming method, resist pattern-forming radiation-sensitive resin composition, and resist film
JSR CORP2 citations61
US9513548B2Dec 6, 2016
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
JSR CORP2 citations60
US12560866B2Feb 24, 2026
Radiation-sensitive resin composition, method of forming resist pattern, polymer, and compound
JSR CORP0 citations59
US11603459B2Mar 14, 2023
Resin composition and method of forming resist pattern
JSR CORP0 citations57
US11130856B2Sep 28, 2021
Resin composition and method of forming resist pattern
JSR CORP0 citations57
US10620534B2Apr 14, 2020
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51
US10564546B2Feb 18, 2020
Resist pattern-forming method
JSR CORP1 citations51
US10082733B2Sep 25, 2018
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51
US10048586B2Aug 14, 2018
Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
JSR CORP0 citations51
US9500950B2Nov 22, 2016
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51
US9213236B2Dec 15, 2015
Fluorine-containing polymer, purification method, and radiation-sensitive resin composition
JSR CORP0 citations51
US9158196B2Oct 13, 2015
Radiation-sensitive resin composition and pattern-forming method
JSR CORP1 citations51
US8609321B2Dec 17, 2013
Radiation-sensitive resin composition, polymer and compound
JSR CORP0 citations51