Inventor

KOUNO DAITA

JP6 patents

⚠️ This page may combine multiple inventors who share the name “KOUNO DAITA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKAMURA ATSUSHI

2 patents

US8076053B2Dec 13, 2011

Upper layer-forming composition and photoresist patterning method

NAKAMURA ATSUSHI10 citations82

US8435718B2May 7, 2013

Upper layer-forming composition and photoresist patterning method

NAKAMURA ATSUSHI2 citations61

KOUNO DAITA

2 patents

US8431332B2Apr 30, 2013

Composition for forming upper layer film for immersion exposure, upper layer film for immersion exposure, and method of forming photoresist pattern

KOUNO DAITA1 citations45

US8507189B2Aug 13, 2013

Upper layer film forming composition and method of forming photoresist pattern

KOUNO DAITA0 citations35

JSR CORP

1 patent

US8697344B2Apr 15, 2014

Composition for forming upper layer film for immersion exposure, upper layer film for immersion exposure, and method of forming photoresist pattern

JSR CORP2 citations60

NISHIMURA YUKIO

1 patent

US8895229B2Nov 25, 2014

Composition for formation of upper layer film, and method for formation of photoresist pattern

NISHIMURA YUKIO1 citations46