P

Inventor

NISHIMURA YUKIO

JP52 patents
⚠️ This page may combine multiple inventors who share the name “NISHIMURA YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

23 patents
US6908722B2Jun 21, 2005

Acid generator, sulfonic acid, sulfonic acid derivatives and radiation-sensitive resin composition

JSR CORP200 citations98
US6933094B2Aug 23, 2005

Radiation-sensitive resin composition

JSR CORP17 citations92
US6800414B2Oct 5, 2004

Radiation-sensitive resin composition

JSR CORP35 citations92
US6337171B1Jan 8, 2002

Radiation-sensitive resin composition

JSR CORP24 citations92
US6753124B2Jun 22, 2004

Radiation-sensitive resin composition

JSR CORP33 citations91
US7217492B2May 15, 2007

Onium salt compound and radiation-sensitive resin composition

JSR CORP17 citations84
US6800419B2Oct 5, 2004

Radiation-sensitive resin composition

JSR CORP14 citations82
US7087356B2Aug 8, 2006

193nm resist with improved post-exposure properties

JSR CORP17 citations81
US6838225B2Jan 4, 2005

Radiation-sensitive resin composition

JSR CORP7 citations70
US7521169B2Apr 21, 2009

Radiation-sensitive resin composition

JSR CORP4 citations63
US7202016B2Apr 10, 2007

Radiation-sensitive resin composition

JSR CORP4 citations62
US6403288B1Jun 11, 2002

Resist pattern formation method

JSR CORP5 citations62
US11681222B2Jun 20, 2023

Fluorine-containing polymer, purification method, and radiation-sensitive resin composition

JSR CORP0 citations61
US11036133B2Jun 15, 2021

Fluorine-containing polymer, purification method, and radiation-sensitive resin composition

JSR CORP0 citations61
US8697344B2Apr 15, 2014

Composition for forming upper layer film for immersion exposure, upper layer film for immersion exposure, and method of forming photoresist pattern

JSR CORP2 citations60
US8808974B2Aug 19, 2014

Method for forming pattern

JSR CORP2 citations59
US7638261B2Dec 29, 2009

Radiation-sensitive resin composition

JSR CORP0 citations52
US7531286B2May 12, 2009

Radiation-sensitive resin composition

JSR CORP1 citations52
US7452655B2Nov 18, 2008

Acrylic copolymer and radiation-sensitive resin composition

JSR CORP1 citations52
US10620534B2Apr 14, 2020

Fluorine-containing polymer, purification method, and radiation-sensitive resin composition

JSR CORP0 citations51
US10082733B2Sep 25, 2018

Fluorine-containing polymer, purification method, and radiation-sensitive resin composition

JSR CORP0 citations51
US9500950B2Nov 22, 2016

Fluorine-containing polymer, purification method, and radiation-sensitive resin composition

JSR CORP0 citations51
US9213236B2Dec 15, 2015

Fluorine-containing polymer, purification method, and radiation-sensitive resin composition

JSR CORP0 citations51

FUJITSU LTD

3 patents

IBM

3 patents

NAKAMURA ATSUSHI

2 patents

MATSUMURA NOBUJI

2 patents

KIMURA TORU

2 patents

NISHITA SATORU

2 patents

NISHIMURA YUKIO

2 patents

KOUNO DAITA

2 patents

NAKAGAWA HIROKI

1 patent

HITACHI LTD

1 patent

AGILENT TECHNOLOGIES INC

1 patent

SAKAKIBARA HIROKAZU

1 patent

UNIV TEXAS

1 patent

MORI TAKASHI

1 patent

HAYAMA TAKAHIRO

1 patent

JEOL LTD

1 patent

OTSUKA NOBORU

1 patent

Showing the top 50 of 52 patents by PatentIndex Score.