Inventor
ROTHWELL MARY BETH
US7 patents
⚠️ This page may combine multiple inventors who share the name “ROTHWELL MARY BETH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6656308B2Dec 2, 2003
Process of fabricating a precision microcontact printing stamp
IBM74 citations93
US6783717B2Aug 31, 2004
Process of fabricating a precision microcontact printing stamp
IBM23 citations90
US6881366B2Apr 19, 2005
Process of fabricating a precision microcontact printing stamp
IBM6 citations60
US7994639B2Aug 9, 2011
Microelectronic structure including dual damascene structure and high contrast alignment mark
IBM2 citations56
US7893549B2Feb 22, 2011
Microelectronic lithographic alignment using high contrast alignment mark
IBM1 citations42